Lam Research 200mm Shallow Trench Plasma Etcher 4420
| Start Price |
USD 75,004.08 |
| Current Price |
USD 75,004.08 |
| Time Left |
- |
| Bid Count |
0 |
| Buy It Now Price |
- |
| Reserve Price |
- |
| Start Time |
Tuesday, July 01, 2008 |
| End Time |
Friday, July 11, 2008 |
| Location |
Albuquerque |
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See more about 'Lam Research 200mm Shallow Trench Plasma Etcher 4420'
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Description
Lam Research 200mm Shallow Trench Plasma Etcher 4420 Inventory #5743 This Lam Research plasma etcher is used surplus which came from a World Class semiconductor manufacturing company known for keeping its tools well maintained. The physical condition is very good and very clean, but there are signs of wear and there is some process residue in the exhaust port (see picture). Also, there is a missing long, thin cover that fits right in front of the indexers. It includes RF all cover and panels, and a Lam ENI RF generator cart, temperature control unit(chiller)(the chiller has an intermittent heater failure), pump rack, power box, and various cables. We had a Lam technician examine and test this tool in our facility. His report is detailed below. Some test notes: The pump rack was not tested. Pumps are not included but can be purchased separately. There is a test video below. Specifications: Model No: 4420B Serial No: 2787 208V, 3ø, 50/60Hz, 30A 200mm wafers, rainbow mainframe ENI OEM-650A RF generator EMPAK XT200 cassette input Edwards QDP40(Rebuilt) Serial No: 14072 QDP80 w/QMB500(Used Working) Serial No: 972156483, 972156351 Lam chiller 2080 TCU, 852-110198-001-C-6882 Decommission date: 1/27/04 Test Video: LAM RESEARCH RAINBOW Model 4420B SYSTEM TEST REPORT The following information was collected during actual system power up checkout. The system was completely facilitated to include a Lam 2080 chiller, Remote AC power distribution panel, Lam remote RF cart, Edwards pump system and associated cabling all of which are included with the sale of this system. Additional information about this is detailed below. The following tests were all performed by James Dixon of Endeavor Technologies a qualified Lam Research Trained, Senior Field Service Engineer. Reports as well as data were collected and prepared for Used Equipment Sales, LLC located at their facility in Albuquerque, New Mexico. Manufacturer: LAM RESEARCH Corporation Model: RAINBOW 4420B Serial Number: 2787 Wafer Size Configuration: 8 inch, 200mm Additional Auxiliary Support Equipment included Lam Remote AC Box. This is the main power distribution panel for the system. This is a 208VAC 3phase 5wire 100 AMP configuration. There are 3 power receptacles to provide power connections to the Main system, RF cart and Chiller. Pump power connection goes through panel for direct connection to circuit breaker. Lam Part number is 685-017705-005. LAM 2080 Dual Channel Chiller. This Lam research Chiller Lam part number is 852-110198-001 Lam Remote RF cart. The remote RF cart has the ENI OEM-650A RF generator serial number 5294 and has been checked out for operation. The Lam part number is 852-014681-005 and the serial number is 109005 and has 18683.22 minutes of RF on time. Edwards pump package Qdp40 RebuiltQDP80/Qmb500 Used tested working Interconnect cable identification and part numbers. <!--[if !supportLists]-->1. <!--[endif]-->Dual Channel Interface cable PN 853-017962-050 <!--[if !supportLists]-->2. <!--[endif]-->RF Generator/ TCU Signal cable PN 853-017922-050 <!--[if !supportLists]-->3. <!--[endif]-->RF generator COAX RF cable PN 853-017805-045 <!--[if !supportLists]-->4. <!--[endif]-->RF generator cart EMO cable PN 853-017825-050 <!--[if !supportLists]-->5. <!--[endif]-->TCU interface Cable PN 853-017964-020 <!--[if !supportLists]-->6. <!--[endif]-->TCU EMO cable PN 853-017824-020 <!--[if !supportLists]-->7. <!--[endif]-->Etcher Power cable PN 853-017810-020 <!--[if !supportLists]-->8. <!--[endif]-->RF Generator Power Cable PN 853-017816-020 <!--[if !supportLists]-->9. <!--[endif]-->TCU Power Cable PN 853-017816-020 System Power up Details. <!--[if !supportLists]-->1. <!--[endif]-->3 Phase power checks completed all within specification. Phase X=125.8 VAC, Phase Y=125.6 VAC, Phase 125.8VAC <!--[if !supportLists]-->2. <!--[endif]-->Power Supply voltages VME DC Voltages Measured -12VDC…………………………………………….-12.35VDC +12VDC…………………………………………...+12.27VDC +5VDC……………………………………………...+5.30VDC I/O DC Voltages +24 VDC…………………………………………..+24.18VDC +15VDC…………………………………………...+15.12VDC -15VDC…………………………………………….-15.10VDC +5VDC……………………………………………...+4.98VDC System Tests Actions Results <!--[if !supportLists]-->1. <!--[endif]-->System power on…………………………………..…Passed <!--[if !supportLists]-->2. <!--[endif]-->System boot up…………………………………...…. Passed <!--[if !supportLists]-->3. <!--[endif]-->Send indexer operation……...……………………..... Passed <!--[if !supportLists]-->4. <!--[endif]-->Load station shuttle……………………………...….. Passed <!--[if !supportLists]-->5. <!--[endif]-->Edge detector initialization………………………...... Passed <!--[if !supportLists]-->6. <!--[endif]-->Load point lifter operation………………………...… Passed <!--[if !supportLists]-->7. <!--[endif]-->Entrance load lock outer door operation.…………..... Passed <!--[if !supportLists]-->8. <!--[endif]-->Entrance load lock vacuum ISO valve operation…..... Passed <!--[if !supportLists]-->9. <!--[endif]-->Entrance load lock soft pump valve operation………. Passed <!--[if !supportLists]-->10. <!--[endif]--> Entrance arm drive initialization……………………. Passed <!--[if !supportLists]-->11. <!--[endif]--> Entrance load lock Inner door operation……………. Passed <!--[if !supportLists]-->12. <!--[endif]--> Chamber gap drive initialization……………………. Passed <!--[if !supportLists]-->13. <!--[endif]--> Chamber 4 Pin Lifter operation……………………... Passed <!--[if !supportLists]-->14. <!--[endif]--> Exit load lock inner door operation…………………. Passed <!--[if !supportLists]-->15. <!--[endif]--> Exit load lock Vacuum ISO valve operation…….…...Passed <!--[if !supportLists]-->16. <!--[endif]--> Exit load lock Soft pump valve operation…………....Passed <!--[if !supportLists]-->17. <!--[endif]--> Exit load lock Arm drive initialization……………….Passed <!--[if !supportLists]-->18. <!--[endif]--> Exit load lock outer door operation…………………. Passed <!--[if !supportLists]-->19. <!--[endif]--> Receive indexer operation…………………………... Passed <!--[if !supportLists]-->20. <!--[endif]-->Wafer alignment ……………………………………...Passed <!--[if !supportLists]-->21. <!--[endif]--> Manual wafer transfer test…………………………....Passed <!--[if !supportLists]-->22. <!--[endif]--> Upper electrode cooing leak checks…………………Passed <!--[if !supportLists]-->23. <!--[endif]--> Lower electrode cooling leak checks…………………Passed <!--[if !supportLists]-->24. <!--[endif]--> Main Chamber vacuum integrity < 2.0mt/min………. Passed <!--[if !supportLists]-->25. <!--[endif]--> Entrance load lock leak rate =12.6mt/min…………....Passed <!--[if !supportLists]-->26. <!--[endif]--> Exit load lock leak rate =32mt/min…………………...Failed* <!--[if !supportLists]-->27. <!--[endif]--> Chamber Heaters…………………………………….. Passed <!--[if !supportLists]-->28. <!--[endif]--> Main chamber ISO valve heater…………………….. Passed <!--[if !supportLists]-->29. <!--[endif]--> Chamber throttle valve heater……………………...… Passed <!--[if !supportLists]-->30. <!--[endif]--> Chamber vacuum manifold heater……………………Failed <!--[if !supportLists]-->31. <!--[endif]--> Pump line manifold heater…………………………….Passed *note: Item 26 & 30 requires further investigation. General Machine Information Upper RF match gear driven part number …………….853-015130-003 Lower RF match gear driven part number …………….853-015130-005 Send and Receive indexers Hine 38A with ergonomic assist loaders. Operating system type is Classic. AC/DC power distribution box is Fuse type. Entrance load lock Arm calibration checks ELL Arm Rotate to chamber counts……………………………… 1043 ELL Arm Extend to chamber counts………………………………..990 ELL Arm Rotate to load point counts……………………………...1056 ELL Arm Extend to load point counts………………………………989 Exit load lock Arm calibration checks XLL Arm Rotate to chamber counts……………………………….. .985 XLL Arm Extend to chamber counts………………………………...981 XLL Arm Rotate to load point counts……………………………...1000 XLL Arm Extend to load point counts……………………………..1000 Gas delivery MFC configuration Gas #1 Tylan model FC-2900………………………………….500 Sccm Helium Gas #2 Tylan model FC-2900………………………………….500 Sccm Argon Gas #3 Tylan model FC-2900………………………………..............50 Sccm O2 Gas #4 Tylan model FC-2900………………………………. …..500 Sccm C2F6Gas #5 Tylan model FC-2900…………………………………….500 Sccm SF6 Gas # 6 Tylan model FC-2900……………………………………200 Sccm HBR Gas #7 Tylan model FC-2900…………………………………….500 Sccm CL2 Gas # 8 Tylan model FC-2900……………………………………500 Sccm NF3 Sale Details: Inventory Number: 5743 Only items pictured are included - If a part is not pictured, or mentioned in the description, then it is not included in the sale. Complete, AS-IS I BUY SEMICONDUCTOR SURPLUS. CALL ME AT 505-228-6568 OR YOU CAN EMAIL ME AT Paul@usedeqsales.com Thank You, Paul Robledo SALE TERMS AND CONDITIONS: Only the pictured items are included in the listing, if it is not pictured or mentioned in the description it is not included. Most items that we offer are guaranteed for ninety (90) days after receipt unless specified in the listing. You will be notified of final shipping fees/charges or dimensions via an eBay invoice after the listing ends; please allow 1-3 days as all items are sent to our shipping department to establish shipping dimensions. Your bid or buy-it-now purchase is a legally binding contract - Place a bid only if you're serious about purchasing the item; If we (the sellers) are unable to establish contact with the winning bidder within 7 days of the end of the auction or if payment is not received within 14 days, item may be offered relisted at the sellers discretion. For all technical questions about our products please contact Paul Robledo at 505.228.6568 PAYMENT INFORMATION: Payments are expected in a timely manner or please contact us in the event that payment cannot be made with seven days as payment arrangements can be made. We accept: PayPal, US Money Orders (US Postal or Bank drawn are preferred), Personal or Company Checks (Please allow 10-14 business days for check to clear) and Bank Wire Transfers in USD (There is a $25 wire transfer fee for transfers under $2000 USD) A 6.75% Sales tax applies to NEW MEXICO residents or provide a resale tax ID for our records. We cannot process the order until we receive sales tax or a copy of your tax ID. SHIPPING DETAILS: All items will be securely packaged or palletized and shipped either via FEDEX, FEDEX LTL or BAX Global to ensure traceability as well as the packages safe arrival. Handling and shipping times may vary based on the packaging requirements. As all items are sent to our shipping department for dimensions before invoices are sent, please allow 5 business days for handling time. All tracking information is forwarded to the email address associated with your PayPal or eBay account. In the event that the bidder/buyer would like to handle the shipping arrangements, please provide use with your FEDEX or UPS shipping information and account number. For those items that require freight shipping, we will provide you with accurate dimensions of the pallet(s) in order for you to arrange pick-up with your preferred carrier. We do require the buyer provide a BILL OF LADING and Shipping Labels sent to us via FAX or eMail before we can release your items; it is the bidder/buyer[s] responsibility to provide this information. In the event that you have questions about European shipping logistics please contact us at 505.345.8732 before purchase. We no longer ship to the Russian Federation, Turkey or European FREE Zones. You will be notified of shipping fees/charges within 1-3 days after listing ends as we require shipping dimensions before invoice can be sent. A contact name, phone number and company name are required for shipping purposes; items may not ship unless this is provided. For faster international processing please provide your VAT Number, Tariff Code, or Schedule B information, if known. International Orders may be subject to, DUTIES, TAXES or other Import Fees; the bidder/buyer[s] is solely responsible for these fees, documents and transportation if held at a customs office in the destination country. Items over 150 lbs. will ship via FREIGHT shipping methods; pallet or crating fees may apply when required. If your item is to ship via Freight methods please let us know if you require home delivery or if a lift-gate is required as additional fees will apply. GUARANTEE / RETURNS: Most items that we offer are guaranteed for thirty (30) days after receipt unless specified in the listing. In the unlikely event that you have received damaged, defective, or incorrectly shipped merchandise please notify us either via phone, fax or email within 30 days of arrival to request a return/refund (please include all eBay item numbers), all returns must include all original items undamaged, in re-saleable condition with all original packaging including manuals, warranty forms, etc.; Software sales are not refundable; Shipping & Handling fees are not refundable; Buyer is responsible for shipping costs incurred shipping products back to us. ABOUT US: We have been offering quality new and used equipment & parts to the industrial, semiconductor and scientific communities since January 2000. Our staff is committed to providing our customers with the widest selection of process equipment at the best prices and all with world class service. Please contact us with any questions that you may have about our items. We also buy semiconductor process parts; you can contact Paul Robledo at 505-228-6568 or at Paul@usedeqsales.com. Used Equipment Sales, LLC4916 Hawkins Street, NEAlbuquerque, New Mexico 87109United StatesOffice: 505.345.8732 Fax: 505.345.8730 HOURS OF OPERATION: Office Hours: Monday - Friday: 8:30 AM - 5:00 PM Mountain Standard Time (MST) Warehouse Delivery Hours: 8:30 AM - 4:00 PM Mountain Standard Time (MST)We are closed Saturday, Sunday and all major US holidays. Location visits by appointment only. I have many more semiconductor process related parts in my eBay store - Controllers. Pumps and More!! CLICK HERE TO VISIT MY STORE - SEMICONDUCTOR EQUIPMENT SPARES
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