Lam Research 200mm Shallow Trench Plasma Etcher 4420 Start Price USD 45,004.08 Current Price USD 45,004.08 Time Left - Bid Count 0 Buy It Now Price - Reserve Price - Start Time Friday, August 29, 2008 End Time Monday, September 08, 2008 Location Albuquerque See more about 'Lam Research 200mm Shallow Trench Plasma Etcher 4420' Description Used Equipment Sales, LLC4916 Hawkins Street, NEAlbuquerque, New Mexico 87109    United States of AmericaOffice: 505.345.8732    Fax: 505.345.8730 Office Hours: Monday - Friday: 8:00 AM - 5:00 PM Mountain Standard Time (MST)     Lam Research 200mm Shallow Trench Plasma Etcher 4420 Inventory # 5743   This Lam Research plasma etcher is used surplus which came from a World Class semiconductor manufacturing company known for keeping its tools well maintained. The physical condition is very good and very clean, but there are signs of wear and there is some process residue in the exhaust port (see picture). Also, there is a missing long, thin cover that fits right in front of the indexers. It includes RF all cover and  panels, and a Lam ENI RF generator cart, temperature control unit/chiller--which has an intermittent heater failure, pump rack, power box, and various cables. We had a Lam technician examine and test this tool in our facility. His report is detailed below. The pump rack was not tested. Pumps are not included, but can be purchased separately.   There is a test video below.   Specifications: Model No: 4420B Serial No: 2787 208V, 3ø, 50/60Hz, 30A 200mm wafers, rainbow mainframe ENI OEM-650A RF generator EMPAK XT200 cassette input Edwards QDP40(Rebuilt) Serial No: 14072  QDP80 w/QMB500(Used Working) Serial No: 972156483, 972156351 Lam chiller 2080 TCU, 852-110198-001-C-6882 Decommission date: 1/27/04 Sale Details: Condition: Clean, used surplus Estimated Packed Shipping Dimensions (does not reflect multiple item orders): L x W x H =   FREIGHT, + 150 lbs.*** PLEASE NOTE – INTERNATIONAL CUSTOMERS PAY ACTUAL SHIPPING CHARGES (See International Shipping Details Below) *** Only items pictured are included - If a part is not pictured, or mentioned in the description, then it is not included in the sale. For multiple listed items, the pictured serial number is not necessarily the one that will be sent. 90-Day Satisfaction Guarantee (See Return Policy below for details)     Test Video:   LAM RESEARCH RAINBOW Model 4420B SYSTEM TEST REPORT  The following information was collected during actual system power up checkout. The system was completely facilitated to include a Lam 2080 chiller, Remote AC power distribution panel, Lam remote RF cart, Edwards pump system and associated cabling all of which are included with the sale of this system. Additional information about this is detailed below. The following tests were all performed by James Dixon of Endeavor Technologies a qualified Lam Research Trained, Senior Field Service Engineer. Reports as well as data were collected and prepared for Used Equipment Sales, LLC located at their facility in Albuquerque, New Mexico.   Manufacturer: LAM RESEARCH Corporation Model: RAINBOW 4420B Serial Number: 2787 Wafer Size Configuration: 8 inch, 200mm   Additional Auxiliary Support Equipment included: Lam Remote AC Box. This is the main power distribution panel for the system. This is a 208VAC 3phase 5wire 100 AMP configuration. There are 3 power receptacles to provide power connections to the Main system, RF cart and Chiller. Pump power connection goes through panel for direct connection to circuit breaker. Lam Part number is 685-017705-005. LAM 2080 Dual Channel Chiller.  This Lam research Chiller  Lam part number is 852-110198-001 Lam Remote RF cart. The remote RF cart has the ENI OEM-650A RF generator serial number 5294 and has been checked out for operation. The Lam part number is 852-014681-005 and the serial number is 109005 and has 18683.22 minutes of RF on time.   Edwards pump package: Qdp40 RebuiltQDP80/Qmb500 Used tested working    Interconnect cable identification and part numbers: 1.     Dual Channel Interface cable PN 853-017962-050 2.     RF Generator/ TCU Signal cable PN 853-017922-050 3.     RF generator COAX RF cable PN 853-017805-045 4.     RF generator cart EMO cable PN 853-017825-050 5.     TCU interface Cable PN 853-017964-020 6.     TCU EMO cable PN 853-017824-020 7.    Etcher Power cable PN 853-017810-020 8.     RF Generator Power Cable PN 853-017816-020 9.     TCU Power Cable PN 853-017816-020 System Power up Details. 1.    3 Phase power checks completed all within specification:           Phase X=125.8 VAC, Phase Y=125.6 VAC, Phase 125.8VAC 2.    Power Supply voltages: VME DC Voltages                                                 Measured -12VDC…………………………………………….-12.35VDC +12VDC…………………………………………...+12.27VDC +5VDC……………………………………………...+5.30VDC I/O DC Voltages +24 VDC…………………………………………..+24.18VDC +15VDC…………………………………………...+15.12VDC -15VDC…………………………………………….-15.10VDC +5VDC……………………………………………...+4.98VDC   System Tests             Actions                                                                     Results  1.     System power on…………………………………..…Passed  2.     System boot up……………………………….…...….Passed  3.     Send indexer operation……...…….……….……….....Passed  4.     Load station shuttle……………….…………..…...…..Passed  5.     Edge detector initialization………..………………........Passed  6.     Load point lifter operation………….……………...…...Passed  7.     Entrance load lock outer door operation.…………........Passed  8.     Entrance load lock vacuum ISO valve operation….........Passed  9.     Entrance load lock soft pump valve operation……….....Passed 10.   Entrance arm drive initialization……………………........Passed 11.   Entrance load lock Inner door operation……………......Passed 12.   Chamber gap drive initialization…………………….......Passed 13.    Chamber 4 Pin Lifter operation…………………….......Passed 14.    Exit load lock inner door operation………………….....Passed 15.    Exit load lock Vacuum ISO valve operation…….….......Passed 16.    Exit load lock Soft pump valve operation…………........Passed 17.    Exit load lock Arm drive initialization……………….......Passed 18.     Exit load lock outer door operation………………….....Passed 19.    Receive indexer operation…………………………........Passed 20.    Wafer alignment ……………………………………......Passed 21.    Manual wafer transfer test…………………………........Passed 22.    Upper  electrode cooing leak checks…………………...Passed 23.     Lower electrode cooling leak checks…………………...Passed 24.     Main Chamber vacuum integrity < 2.0mt/min………......Passed 25.     Entrance load lock leak rate =12.6mt/min…………........Passed 26.     Exit load lock leak rate =32mt/min………………….......Failed* 27.      Chamber Heaters…………………………………….... Passed 28.      Main chamber ISO valve heater…………………….......Passed 29.      Chamber throttle valve heater……………………...…...Passed 30.      Chamber vacuum manifold heater……………………....Failed* 31.      Pump line manifold heater……………………………....Passed *note: Item 26 & 30 requires further investigation.   General Machine Information Upper RF match gear driven part number …………….853-015130-003 Lower RF match gear driven part number …………….853-015130-005 Send and Receive indexers Hine 38A with ergonomic assist loaders. Operating system type is Classic. AC/DC power distribution box is Fuse type. Entrance load lock Arm calibration checks ELL Arm Rotate to chamber counts……………………………… 1043 ELL Arm Extend to chamber counts………………………………..990 ELL Arm Rotate to load point counts……………………………...1056 ELL Arm Extend to load point counts………………………………989 Exit load lock Arm calibration checks XLL Arm Rotate to chamber counts……………………………….. .985 XLL Arm Extend to chamber counts………………………………...981 XLL Arm Rotate to load point counts……………………………...1000 XLL Arm Extend to load point counts……………………………..1000 Gas delivery MFC configuration Gas #1 Tylan model FC-2900………………………………….500 Sccm Helium  Gas #2 Tylan model FC-2900………………………………….500 Sccm Argon Gas #3 Tylan model FC-2900………………………………..............50 Sccm O2 Gas #4 Tylan model FC-2900………………………………. …..500 Sccm C2F6Gas #5 Tylan model FC-2900…………………………………….500 Sccm SF6 Gas # 6 Tylan model FC-2900……………………………………200 Sccm HBR Gas #7 Tylan model FC-2900…………………………………….500 Sccm CL2 Gas # 8 Tylan model FC-2900……………………………………500 Sccm NF3       I ALSO BUY SEMICONDUCTOR SURPLUS.  CALL ME AT 505-228-6568 OR EMAIL ME Paul@usedeqsales.com Thank You, Paul Robledo   HOURS OF OPERATION: Office Hours: Monday - Friday: 8:00 AM - 5:00 PM Mountain Standard Time (MST) Warehouse Delivery Hours: 8:30 AM - 4:00 PM Mountain Standard Time (MST)We are closed Saturday, Sunday and all major US holidays. Location visits by appointment only.   SALE TERMS AND CONDITIONS:  Only the pictured items are included in the listing, if it is not pictured or mentioned in the description it is not included.  Place a bid only if you are serious about purchasing the item.  If we (the sellers) are unable to establish contact with the winning bidder within 7 days of the end of the auction or if payment is not received within 14 days, the item(s) will be relisted at our discretion.   PAYMENT INFORMATION: Payments are expected in a timely manner. Please contact us in the event that payment cannot be made within seven days. Payment arrangements can be made. We accept: PayPal, All Major Credit Cards, Personal or Company Checks (Please allow 10-14 business days for check to clear), Bank Wire Transfers in USD (There is a $25 wire transfer fee for transfers under $2000 USD) and US Money Orders (US Postal or Bank drawn are preferred), A 6.75% Sales tax applies to NEW MEXICO residents or provide a resale tax ID for our records. We cannot process the order until we receive sales tax or a copy of your tax ID. SAME DAY SHIPPING POLICY:If you need your item shipped on the same day as your purchase, you will need to call us by 12:00 Noon, Mountain Standard Time at 505-345-8732. We will do our best to get this shipped out on the same day.  There will be a 10% expediting fee that will be charged. SHIPPING DETAILS: All items will be securely packaged or palletized and shipped via the best and most economical way possible. Shipping and handling times may vary based on the packing requirements, so please allow up to 5 business days for handling time. All tracking information is forwarded to the email address associated with your PayPal or eBay account.   DOMESTIC SHIPPING A contact name, phone number and company name are required for shipping purposes; items may not ship unless this is provided. In the event that the bidder/buyer would like to handle the shipping arrangements, please provide us with your FEDEX or UPS shipping information and account number. INTERNATIONAL SHIPPING Please allow a 24 hour response time due to time difference.  (See Hours of Operation, above) A contact name, phone number and company name are required for shipping purposes; items may not ship unless this is provided. In the event that you have questions about European shipping logistics please contact us at 505.345.8732 before purchase. We no longer ship to the Russian Federation, Turkey or European FREE Zones. International Orders are subject to DUTIES, TAXES or other Import Fees; the bidder/buyer[s] is solely responsible for these fees, documents and transportation if held at a customs office in the destination country. For faster international processing please provide your VAT Number, Tariff Code, or Schedule B information, if known. We use heat treated wood for pallets and crates on all international orders FREIGHT A contact name, phone number and company name are required for shipping purposes; items may not ship unless this is provided. You will be notified of shipping fees/charges within 1-3 days after listing ends as we require shipping dimensions before an invoice can be sent. Items over 150 lbs. will ship via FREIGHT. Pallet or crating fees may apply when required. If your item is to ship via Freight methods, please let us know if you require home delivery or if a lift-gate is required as additional fees will apply. If you want to arrange your own transportation, we will provide you with accurate dimensions of the pallet(s).  However, we do require that the buyer provide a BILL OF LADING and Shipping Labels sent to us via FAX or email before we can release your item(s). RETURN POLICY: 90-DAY SATISFACTION GUARANTEE Customer satisfaction is our priority.  If you are not completely satisfied with your purchase, please contact us within 90 days of your purchase and we will refund 100% of your purchase price.  You should notify us either by phone, fax or email within 90 days of purchase.  To expedite the process, please include all eBay item numbers.  All returns must include all original undamaged items, in re- saleable condition with all original packaging including manuals, warranty forms, etc. Software sales are non-refundable. Shipping & Handling fees are non-refundable. Buyer is responsible for return item shipping costs.   CONTACT INFORMATION: For all technical questions about our products please contact Paul Robledo at 505.228.6568 For all customer service related issues, shipping and/or payment questions, please call our office at 505.345.8732   Used Equipment Sales, LLC4916 Hawkins Street, NEAlbuquerque, New Mexico 87109    United States of AmericaOffice: 505.345.8732    Fax: 505.345.8730 ABOUT US: We have been offering top quality, new and used equipment and parts to the industrial, semiconductor and scientific communities since January 2000. Our staff is committed to providing our customers with the widest selection of process equipment at the best prices, and all with world class service. Please contact us with any questions that you may have about our items. We also buy semiconductor process parts; you can contact Paul Robledo at 505-228-6568 or at Paul@usedeqsales.com.   I have a large number of semiconductor process related parts in my eBay store – RF Generators, Robots, Pumps, Controllers, Large Equipment, and More!!! CLICK HERE TO VISIT MY STORE - SEMICONDUCTOR EQUIPMENT SPARES Place a Bid!